Particle Counter
For Inline Measurement

KL-28BF(KS-28BF+KE-28B)

Liquid-borne Particle Counters

Detects particles down to 0.2 µm size

  • Compact and integrated use for facility monitoring system
  • Versatile array of interface: RS-232C, RS-485, 4-20 mA, 1-6 V
  • Multi-point monitoring is possible with optional software such as RP-monitor
For Multi-point Monitoring
For HF
For Photoresist
For Inline Measurement

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 780 nm, rated output 40 mW)
Materials of parts exposed to sample fluid Sapphire, PFA, PTFE
Measurement size range 2 channels: ≥0.2 µm, ≥0.5 µm
Flow rate 10 mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements supplied by KE-28B, 100 V AC, Approx. 23 VA
Dimensions Approx. 70 (H) x 85 (W) x 118 (D) mm
Weight Approx. 0.8 kg

Option

Bellows Sampler
K9904B(K9904D)
Flow controller
XL-24
Standard Particle Concentration
CLINTEX