Particle Sensor
For Inline Measurement
KS-16F
Liquid-borne Particle Counters
Detects partciles down to 0.1 µm size
- Process monitoring at critical system points
- Integrated use in central chemical supply systems and wet benches
- Counting efficiency is 60% and higher
- Deionized water, chemical solution, hydrofluoric (KS-16F) measurements
- Controlled by monitoring software
- Build up real time monitoring system with the software of RP-monitor
Specification
| Optical system | Light-scattering method |
|---|---|
| Light source | Laser diode (wavelength: 830 nm, rated output 200 mW) |
| Materials of parts exposed to sample fluid | Sapphire, PFA |
| Measurement size range | 5 channels: ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm |
| Flow rate | 10 mL/min |
| Maximum particle number concentration | 1,200 particles/mL (coincidence loss 5%) |
| Power requirements | 100 V to 240 V AC, Approx. 40 VA (including external power requirement KZ-50 (accessory)) |
| Dimensions | Approx. 110 (H) x 240 (W) x 150 (D) mm |
| Weight | Approx. 3.5 kg |
