Particle Sensor
For Measuring Batch Samples
For Inline Measurement
KS-41A
Liquid-borne Particle Counters
Ideal for Monitoring 0.15 µm Particles in Photoresist, SOG, and Other Solutions
- Integrated leak sensor with alarm output
- User selectable channels within measurement range (using KE-40B1 function)
Specification
| Optical system | Light-scattering method |
|---|---|
| Light source | Laser diode (wavelength: 830 nm, rated output 200 mW) |
| Materials of parts exposed to sample fluid | Synthetic quartz, PFA |
| Measurement size range | 4 channels (Factory default): ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm Setting range 0.15 µm to 0.5 µm |
| Flow rate | 10 mL/min |
| Maximum particle number concentration | 1,200 particles/mL (coincidence loss 5%) |
| Power requirements | DC12 V (Supplied by KE-40B1) |
| Dimensions | Approx. 160 (H) x 300 (W) x 251 (D) mm |
| Weight | Approx. 7.5 kg |
