Particle Sensor
For Measuring Batch Samples
For Inline Measurement
KS-41B
Liquid-borne Particle Counters
Measures 0.1 µm Particles in Photoresist, SOG and other solutions
- Can be connected to the multiple monitoring system
Specification
| Optical system | Light-scattering method |
|---|---|
| Light source | Diode pumped solid state laser (wavelength: 532 nm, rated output 500 mW) |
| Materials of parts exposed to sample fluid | Synthetic quartz, PFA |
| Measurement size range | 5 channels (Factory default): ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm Setting range 0.1 µm to 0.5 µm |
| Flow rate | 5 mL/min |
| Maximum particle number concentration | 9,600 particles/mL (coincidence loss 10%) |
| Power requirements | DC12 V (Supplied by KE-40B1) |
| Dimensions | Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts) |
| Weight | Approx. 12.5 kg |
