Particle Sensor
For Gas
KS-93
Airborne Particle Counters
Ideally suited for cleanliness control of specialgas supply systems
- Enables inline measurement of semiconductor special materialgases
Specification
| Optical system | Light-scattering method |
|---|---|
| Light source | Laser diode (wavelength: 830 nm, rated output 200 mW) |
| Measurement size range | 5 channels: ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.6 µm |
| Flow rate | 100 mL/min |
| Maximum particle number concentration | 30,000 particles/L (coincidence loss 5%) |
| Power requirements | 100 V to 240 V AC, 40 VA (including external power requirement KZ-50(accessory)) |
| Dimensions | Approx. 135 (H) x 280 (W) x 150 (D) mm |
| Weight | Approx. 6.5 kg |
| Minimum detectable particle size | 0.1 μm |
